Lam Research Announces Semiconductor Industry’s First Collaborative Robot, Dextro

Lam Research Corp. announced Dextro, the semiconductor industry’s first collaborative robot, on December 10, 2024. Dextro performs critical maintenance tasks on wafer fabrication equipment with high precision, minimizing tool downtime and production variability. It is now deployed at several leading-edge wafer fabs.

For technicians and engineers responsible for equipment maintenance at semiconductor fabs, Dextro’s key advantage is its ability to repeatedly perform tightening and cleaning tasks with high precision, reducing the errors that can arise from manual work. Lam Research says it aims to reduce tool downtime and production variability and cut repeat repair work.